AlN-based PiezoMEMS

Vacuum Deposition Equipment for Metallization

From smartphones to smartwatches, piezoelectric Micro-Electro-Mechanical Systems (piezoMEMS) power the tiny sensors that make our devices responsive, intuitive, and energy-efficient. With ultra-low power consumption and high sensitivity, piezoMEMS are the invisible force driving the future of wearable tech, IoT, and smart living.

The OPTA X platform enables the precise deposition of high-performance piezoelectric materials such as AlN and AlScN. They are tailored for piezoMEMS applications due to their excellent mechanical properties, CMOS compatibility, and environmental stability. These advanced thin films facilitate the creation of highly sensitive sensors and actuators by efficiently converting mechanical forces and displacements into electrical signals, and vice versa.

With our new process, you can produce reliable homogeneity in both thickness and stoichiometry across 200-mm and 300-mm wafer substrates, optimizing throughput and yield in high-volume manufacturing.