MEMS
Vacuum Deposition Equipment & Solutions for MEMS Manufacturing

Micro-electro-mechanical systems (MEMS) are tiny devices that combine the properties of mechanical and electronic components. They are used in a wide range of applications, including sensors, display technologies and microfluidics. 

We offer you flexible, highly configurable vacuum deposition systems for MEMS manufacturing. They enable you to combine different technologies, such as etching, deposition of metal, semiconductor and passivation layers, post-treatment or other custom requirements, depending on your specific application.

Would you like to learn more? Explore the content below or contact us.

High-flexibility, configurable equipment

easily supports new processes & requirements

Compact design

saves valuable fab floorspace

Fully automated platforms

drive cost efficiencies

Equipment
OPTA XRotary Disc Coating SystemLearn more
Perspective view of a VON ARDENNE cluster system.
CLUSTER SYSTEMSfor Research, Develop­ment & ProductionLearn more
Technologies
Magnetron SputteringKey Technology from In-house Development & ManufacturingLearn more
CLEANROOM
VA CLEANROOM
Cleanroom-Compatible Sampling & Assembly Facility

for precision optics, photonics & semiconductor applications

  • Manufacturing of vacuum coating systems
  • Sampling & pilot deposition services
  • 600 m² semiconductor cleanroom including AMC capability
Support

Engineering
Simulation . Sampling . Layout

Learn more
Perspective view of a VON ARDENNE sampling and testing equipment.

Technology & Application Center
Sampling . Development . Scaling

Learn more

Service
Customer Portal . Spare Parts . Trainings

Learn more
Media
VON ARDENNE Unveils New Cleanroom at Headquarters

State-of-the-art facility for sampling, assembly and commissioning

VON ARDENNE Launches New OPTA X300 Deposition Tool and Opens New Cleanrooms in Dresden, Germany

Company showcases its advanced engineering capabilities and new deposition solutions at SEMICON West

Customer Portal "myVA" Now Available

It's here: the myVA Customer Portal. VON ARDENNE has developed it with the aim of simplifying interactions, providing valuable insights and increasing…

VIDEO: AVS 2022 - Key Takeaways

This video provides some insights into the AVS68 International Symposium and Exhibition in Pittsburgh hosted by the American Vacuum Society. Brian…

CONTACT
20.01.2026 - 22.01.2026
SPIE Photonics West 2026

San Francisco, CA, USA

The Moscone Center

Booth 2261

13.10.2026 - 15.10.2026
Semicon West 2026

San Francisco, CA, USA

Moscone Center

North Hall | Booth 5373

SALES Contact

Am Hahnweg 8
01328 Dresden
Germany

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