Cluster systems are based on a platform with many modular units. Therefore, you can configure each coater according to your specific applications. On top of that, special features can be integrated to meet your demands. Thanks to this flexibility, VON ARDENNE cluster systems will help you reduce your cost of ownership.
VON ARDENNE cluster systems are so versatile that they meet the technological requirements of research and development facilities but are also suitable for mass production. This is especially true for the development of new coating technologies and the creation of layers with specific properties and a high reproducibility.
The systems can be configured individually for different tasks: up to seven process chambers and one or more load locks can be installed around the central transfer chamber. All chambers are separated from each other, both vacuum wise and with regards to their control technology.
